Dry Vacuum Pump LR/HR/UR Series
Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]
The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.
- Company：アルバック／ULVAC, Inc.
- Price：Other
